Development of a multi-layer microelectrofluidic platform
نویسندگان
چکیده
منابع مشابه
Development of a multi-layer microelectrofluidic platform
We report on the development of process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were conducted to look at the effects of load applied, embossing temperature and embossing time on the fidelity of line arrays representing micro channels. The results reveal...
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We report on the development of some process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were conducted to look at the effects of load applied, embossing temperature and embossing time on the fidelity of line arrays representing micro channels. The results r...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2007
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-006-0341-6